1. Temperature range: 77degK ~ 480degK.
2. Micropositioner: 4~6sets.
3. Wide working distance.
4. Sub-micron resolution.
5. Microscope X-Y stage.
6. Vacuum pump: 10^-3 (standard) with vacuum sensor.
7. Temperature controller.
8. Thermo-couple @ certain position & thermo-meter.
9. 50 Nitrogen Dewar.
10. Include connecting for liquid-nitrogen & nitrogen gas…etc.
Option items:
1. Sub-PA leakage level.
2. Vibration isolation.
3. High vacuum pump & chamber.
4. Microscope bridge.