Description :

1. Linear quick Z pneumatic up/down.
2. Microscope X-Y Stage.
3. Encording positioning display with Sub-micron resolution.
4. Large area platen.
5. 1um resolution Micropositioner.
6. Vibration isolation.

Specification :

1. Substrate size: 500mmx400mm.

2. High magnification microscope: EP.10~20X, Zoom.1~2X, OB.2X, 10X, 20X, 50X...

3. Chuck Theta.